KLA-TENCOR SURFSCAN 6220 DEFECT INSPECTION SYSTEM consisting of: 

- Model: Surfscan 6220 
- Automatic Surface Inspection System
- Bare Wafer Surface Defect Inspection System
- Substrate/Sizes: 2", 3", 4", 6" and 8" Wafer Capable
- Thickness: SEMI Standard Wafer Thickness
- Material: Any Opaque, Polished Surface which Scatters less than 5 percent of Incident Light
- Defect Sensitivity: 0.09 Micrometer Diameter PSL Sphere Equivalent with greater than 80 percent Capture Rate (0.112um @ 90%)
- Repeatability: Count Repeatability Error less than 0.5 percent at 1 Standard Deviation (Mean Count greater than 500, 0.364 mm dia. Latex Spheres)
- Accuracy: Count Accuracy better than 99 percent (verified with VLSI Standards’ Relative Standard)
- Throughput: 100 wph (200 mm) at 0.12 mm
- Contamination: Less than 0.005 Particles/cm2 greater than 0.15 mm dia. per single pass
- Cassette Handling: Single Puck Wafer Handling from two Cassettes (one Sender/Receiver, one Receiver)
- Illumination Source: 30 mW Argon-Ion laser, 488 nm Wavelength
- Operator Interface: Mouse and/or Dedicated User Keypad
- Operations Manual and Documentation
- Power Supply will fit to the Customer Location

OPTION AVAILABLE AT ADDITIONAL COST:

SECS/GEM Software and Interface Equipment Upgrade:

- SECS/GEM Software with Programmed Dallas Chip
- Interface Network Card and Cable
- SECS/GEM Manual for the Surfscan 6220 Tools

KLA-TENCOR SURFSCAN 6220 REFURBISHMENT PROCESS consists of:

- Replace used Laser with New Laser

- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required

- Replace used Power Supply, as required

- Replacement or repair of any bad circuit board.

- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.

- Optics assemblies cleaned and aligned to meet performance specs or replaced as needed

- Electronic assemblies tested to meet performance specifications or replaced as needed

- Puck assembly rebuilt or replaced (if applicable)

- Calibrate system using calibration wafers

- Machine covers are cleaned, polished, or replaced, as needed

- System transport locks installed; system prepared for shipment

- Refurbishment carried out by KLA-Tencor Trained Technicians

- Upgrade Intel 75MHz processor to 200 MHz Pentium and Windows OS 98 SE