产品名称:KLA-Tencor Surfscan 4500颗粒度仪
型  号:10157-186
出品单位:KLA-Tencor
更新时间:2017.03.02
查看次数:5687
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PICTURE:
Unpatterned Wafer Surface Inspection Tool, up to 6”/150mm Capable
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DETAILS:

KLA-TENCOR SURFSCAN 4500 INSPECTION SYSTEM consisting of: 

- Model 4500 Main System
- Can handle from 2" up to 6"/150mm wafers
- Submicron sensitivity, detects 0.2 micron particles
- Surface haze detected as low as 0.4 ppm.
- Handles high scattering surfaces such as metals, polysilicon and cvd films.
- Map locations and size available for each particle.
- Fully refurbished to meet factory specifications 
- New 17" LCD Monitor installed
- Operations Manual and documentation

Refurbished to Factory Specifications consisting of: 

- New Laser
- New Belts
- Clean or Replace Optics and Mirrors
- System calibrated to OEM specifications with NIST Calibration Standard
- Optics Alignment 
- Indexer sensor replacement
- Vacuum line change out
- New 17" LCD Monitor
- 6 Month Warranty on Parts and Labor (Laser warranty is 6 months or 5000 hours whichever comes first)

CONDITION:

Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne. 
6 Month Warranty and Specifications Guarantee.
30 Day Right of Return.


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